Inventor
SHINOHARA TOMOYUKI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “SHINOHARA TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
7 patentsUS12463063B2Nov 4, 2025
Substrate cleaning device
SCREEN HOLDINGS CO LTD0 citations61
US12593654B2Mar 31, 2026
Substrate alignment device, substrate processing apparatus, substrate alignment method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US12251735B2Mar 18, 2025
Substrate cleaning device and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations51
US12485461B2Dec 2, 2025
Substrate cleaning device, substrate cleaning system, substrate processing system, substrate cleaning method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US12036583B2Jul 16, 2024
Substrate cleaning device and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations50
US12017257B2Jun 25, 2024
Substrate cleaning device and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations50
US12036662B2Jul 16, 2024
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49