Inventor
OKITA NOBUAKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “OKITA NOBUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
11 patentsUS11114302B2Sep 7, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations69
US12463063B2Nov 4, 2025
Substrate cleaning device
SCREEN HOLDINGS CO LTD0 citations61
US12593654B2Mar 31, 2026
Substrate alignment device, substrate processing apparatus, substrate alignment method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US12485461B2Dec 2, 2025
Substrate cleaning device, substrate cleaning system, substrate processing system, substrate cleaning method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US12246358B2Mar 11, 2025
Substrate cleaning apparatus and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations50
US12036583B2Jul 16, 2024
Substrate cleaning device and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations50
US12017257B2Jun 25, 2024
Substrate cleaning device and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations50
US11813646B2Nov 14, 2023
Substrate processing device
SCREEN HOLDINGS CO LTD0 citations50
US12036662B2Jul 16, 2024
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US11101146B2Aug 24, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US11361979B2Jun 14, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations48