Inventor
OKADA YOSHIFUMI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “OKADA YOSHIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
9 patentsUS12463063B2Nov 4, 2025
Substrate cleaning device
SCREEN HOLDINGS CO LTD0 citations61
US12593654B2Mar 31, 2026
Substrate alignment device, substrate processing apparatus, substrate alignment method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US12485461B2Dec 2, 2025
Substrate cleaning device, substrate cleaning system, substrate processing system, substrate cleaning method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US12246358B2Mar 11, 2025
Substrate cleaning apparatus and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations50
US12036583B2Jul 16, 2024
Substrate cleaning device and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations50
US12017257B2Jun 25, 2024
Substrate cleaning device and substrate cleaning method
SCREEN HOLDINGS CO LTD0 citations50
US12036662B2Jul 16, 2024
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US10186418B2Jan 22, 2019
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39
US9349625B2May 24, 2016
Substrate conveyance method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39