Inventor
HUNG CHIA-MING
TW38 patents
⚠️ This page may combine multiple inventors who share the name “HUNG CHIA-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
25 patentsUS9567204B2Feb 14, 2017
Microelectrochemical systems (MEMS) device having a seal layer arranged over or lining a hole in fluid communication with a cavity of the MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD18 citations92
US10392244B2Aug 27, 2019
Method for sealing a cavity of a microelectromechanical systems (MEMS) device using a seal layer covering or lining a hole in fluid communication with the cavity
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US10131540B2Nov 20, 2018
Structure and method to mitigate soldering offset for wafer-level chip scale package (WLCSP) applications
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US9656857B2May 23, 2017
Microelectromechanical systems (MEMS) devices at different pressures
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations84
US10464808B2Nov 5, 2019
Semiconductor arrangement and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10266396B2Apr 23, 2019
MEMS device with enhanced sensing structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9845236B2Dec 19, 2017
Monolithic MEMS platform for integrated pressure, temperature, and gas sensor
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9776858B2Oct 3, 2017
Semiconductor arrangement and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9630832B2Apr 25, 2017
Semiconductor device and method of manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations73
US12587284B2Mar 24, 2026
High speed optical receiver system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12139399B2Nov 12, 2024
Conductive bond structure to increase membrane sensitivity in MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11292715B2Apr 5, 2022
Conductive bond structure to increase membrane sensitivity in MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10981781B2Apr 20, 2021
Semiconductor arrangement and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12162749B2Dec 10, 2024
Bond wave optimization method and device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11834332B2Dec 5, 2023
Bond wave optimization method and device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11491510B2Nov 8, 2022
Semiconductor device having microelectromechanical systems devices with improved cavity pressure uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US9856139B2Jan 2, 2018
Microelectromechanical systems (MEMS) devices at different pressures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US9714166B2Jul 25, 2017
Thin film structure for hermetic sealing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12269735B2Apr 8, 2025
Dielectric protection layer configured to increase performance of mems device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9584003B2Feb 28, 2017
Energy-harvesting device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12400926B2Aug 26, 2025
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12304807B2May 20, 2025
Semiconductor device comprising different types of microelectromechanical systems devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12257602B2Mar 25, 2025
Semiconductor device having microelectromechanical systems devices with improved cavity pressure uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US11851323B2Dec 26, 2023
Semiconductor device comprising different types of microelectromechanical systems devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12507426B2Dec 23, 2025
Semiconductor device and manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
TAIWAN SEMICONDUCTOR MFG
5 patentsUS9202792B2Dec 1, 2015
Structure and method of providing a re-distribution layer (RDL) and a through-silicon via (TSV)
TAIWAN SEMICONDUCTOR MFG7 citations84
US9266714B2Feb 23, 2016
Micro-electro mechanical system (MEMS) structures and methods of forming the same
TAIWAN SEMICONDUCTOR MFG6 citations83
US8928162B2Jan 6, 2015
Sensor with energy-harvesting device
TAIWAN SEMICONDUCTOR MFG4 citations83
US9246401B2Jan 26, 2016
Energy-harvesting device and method of forming the same
TAIWAN SEMICONDUCTOR MFG0 citations51
US8763220B2Jul 1, 2014
Method of manufacturing a MEMS device
TAIWAN SEMICONDUCTOR MFG0 citations51
SHU CHIA-PAO
3 patentsUS8716852B2May 6, 2014
Micro-electro mechanical systems (MEMS) having outgasing prevention structures and methods of forming the same
SHU CHIA-PAO26 citations91
US9365416B2Jun 14, 2016
Structure and method for motion sensor
SHU CHIA-PAO12 citations83
US8723280B2May 13, 2014
Hybrid MEMS bump design to prevent in-process and in-use stiction
SHU CHIA-PAO2 citations62