Inventor

SCHMIDT MARTIN A

US33 patents

⚠️ This page may combine multiple inventors who share the name “SCHMIDT MARTIN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHMIDT MARTIN A

MASSACHUSETTS INST TECHNOLOGY

Micromachined threshold pressure switch and method of manufacture

Backside contact of sensor microstructures

Method for fabricating side drive electrostatic micromotor

Electrostatic micromotor

Microfabricated chemical reactor

Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions

Microturbomachinery

Microturbomachinery

Electrostatic micromotor

Thermally efficient micromachined device

Turbulent shear force microsensor

Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions

Wall shear stress sensor

Superconducting detector and method of making same

Thermally efficient micromachined device

Method and apparatus for controlling film deposition

BULOVIC VLADIMIR

Method and apparatus for depositing LED organic film

Method and apparatus for depositing LED organic film

Method and apparatus for depositing LED organic film

Method and apparatus for depositing LED organic film

Method and apparatus for forming structures of polymer nanobeads

INPUT OUTPUT INC

Micro machined mirror

Sensor design and process

Sensor design and process

Sensor design and process

AXSUN TECH INC

Electrostatic zipper actuator optical beam switching system and method of operation

Process for fabricating stiction control bumps on optical membrane via conformal coating of etch holes

BOSCH GMBH ROBERT

Method of making a microvalve

Method of making a microvalve

GEN MOTORS CORP

Method of selectively etching silicon

Selective electrochemical etching

GUENTHER AXEL

Fluid separation

AKINWANDE AKINTUNDE I

Single-use, permanently-sealable microvalve