Inventor
ITO TAKAHISA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “ITO TAKAHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
4 patentsUS7242095B2Jul 10, 2007
Semiconductor device having a dummy pattern
FUJITSU LTD10 citations82
US7279259B2Oct 9, 2007
Method for correcting pattern data and method for manufacturing semiconductor device using same
FUJITSU LTD10 citations79
US7146035B2Dec 5, 2006
Pattern image comparison method, pattern image comparison device, and program
FUJITSU LTD7 citations73
US6968531B2Nov 22, 2005
Exposure method utilizing optical proximity corrected exposure patterns, an apparatus for generating optical proximity corrected exposure data, and an exposure apparatus for optical proximity corrected exposure data
FUJITSU LTD5 citations60