Inventor
YOSHIMURA KOKI
JP6 patents
Patents
6 patentsUS11031261B2Jun 8, 2021
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations60
US9470979B2Oct 18, 2016
Developing treatment apparatus and developing treatment method
TOKYO ELECTRON LTD1 citations51
US9304398B2Apr 5, 2016
Developing treatment apparatus and developing treatment method
TOKYO ELECTRON LTD0 citations51
US10014190B2Jul 3, 2018
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations50
US12347698B2Jul 1, 2025
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD0 citations38
US10649334B2May 12, 2020
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations35