Inventor
CHEN YAO-HSIANG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHEN YAO-HSIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
2 patentsUS7265009B2Sep 4, 2007
HDP-CVD methodology for forming PMD layer
TAIWAN SEMICONDUCTOR MFG3 citations57
US6461966B1Oct 8, 2002
Method of high density plasma phosphosilicate glass process on pre-metal dielectric application for plasma damage reducing and throughput improvement
TAIWAN SEMICONDUCTOR MFG5 citations55