Inventor
OGURE NAOAKI
JP34 patents
⚠️ This page may combine multiple inventors who share the name “OGURE NAOAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
31 patentsUS6294059B1Sep 25, 2001
Substrate plating apparatus
EBARA CORP83 citations98
US6387182B1May 14, 2002
Apparatus and method for processing substrate
EBARA CORP113 citations97
US6921722B2Jul 26, 2005
Coating, modification and etching of substrate surface with particle beam irradiation of the same
EBARA CORP56 citations96
US6036783AMar 14, 2000
Liquid material vaporizer apparatus and gas ejection device
EBARA CORP63 citations96
US6005183ADec 21, 1999
Device containing solar cell panel and storage battery
EBARA CORP96 citations96
US5862605AJan 26, 1999
Vaporizer apparatus
EBARA CORP62 citations96
US5630881AMay 20, 1997
Thin-film forming apparatus with magnetic bearings and a non-contact seal and drive
EBARA CORP65 citations96
US6147408ANov 14, 2000
Method of forming embedded copper interconnections and embedded copper interconnection structure
EBARA CORP31 citations93
US6651871B2Nov 25, 2003
Substrate coated with a conductive layer and manufacturing method thereof
EBARA CORP31 citations92
US6486413B1Nov 26, 2002
Substrate coated with a conductive layer and manufacturing method thereof
EBARA CORP17 citations92
US6365017B1Apr 2, 2002
Substrate plating device
EBARA CORP31 citations92
US6558518B1May 6, 2003
Method and apparatus for plating substrate and plating facility
EBARA CORP36 citations91
US5829156ANov 3, 1998
Spin dryer apparatus
EBARA CORP40 citations91
US5705230AJan 6, 1998
Method for filling small holes or covering small recesses in the surface of substrates
EBARA CORP43 citations91
US5820649AOct 13, 1998
Method of and apparatus for continuously producing a solid material
EBARA CORP27 citations86
US6972256B2Dec 6, 2005
Method and apparatus for forming thin film of metal
EBARA CORP17 citations84
US6730596B1May 4, 2004
Method of and apparatus for forming interconnection
EBARA CORP19 citations84
US6054714AApr 25, 2000
Electron-beam irradiation apparatus
EBARA CORP16 citations84
US7799425B2Sep 21, 2010
Composite nanoparticles method for producing the same
EBARA CORP12 citations77
US6787467B2Sep 7, 2004
Method of forming embedded copper interconnections and embedded copper interconnection structure
EBARA CORP7 citations74
US6709555B1Mar 23, 2004
Plating method, interconnection forming method, and apparatus for carrying out those methods
EBARA CORP12 citations74
US6573201B1Jun 3, 2003
Method and apparatus for protection of substrate surface
EBARA CORP11 citations74
US6495004B1Dec 17, 2002
Substrate plating apparatus
EBARA CORP9 citations74
US6458694B2Oct 1, 2002
High energy sputtering method for forming interconnects
EBARA CORP7 citations74
US6455475B1Sep 24, 2002
Sliding member and process for producing the same
EBARA CORP8 citations74
US7033463B1Apr 25, 2006
Substrate plating method and apparatus
EBARA CORP10 citations73
US6793794B2Sep 21, 2004
Substrate plating apparatus and method
EBARA CORP7 citations73
US6929722B2Aug 16, 2005
Substrate plating apparatus
EBARA CORP2 citations63
US6432257B1Aug 13, 2002
Dresser for polishing cloth and method for manufacturing such dresser and polishing apparatus
EBARA CORP6 citations60
US4861395AAug 29, 1989
Method of using machine parts made of austenitic cast iron having resistance to stress corrosion cracking in contact with salt water
EBARA CORP5 citations56
US6391775B1May 21, 2002
Method of forming embedded copper interconnections and embedded copper interconnection structure
EBARA CORP0 citations52