Inventor
RUSSELL RONALD O
US3 patents
Patents
3 patentsUS6221155B1Apr 24, 2001
Chemical vapor deposition system for polycrystalline silicon rod production
ADVANCED SILICON MATERIALS LLC76 citations93
US6749824B2Jun 15, 2004
Chemical vapor deposition system for polycrystalline silicon rod production
ADVANCED SILICON MATERIALS LLC24 citations89
US6544333B2Apr 8, 2003
Chemical vapor deposition system for polycrystalline silicon rod production
ADVANCED SILICON MATERIALS LLC35 citations89