Inventor
CHI CHIU
US6 patents
⚠️ This page may combine multiple inventors who share the name “CHI CHIU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
3 patentsUS6713342B2Mar 30, 2004
FeRAM sidewall diffusion barrier etch
TEXAS INSTRUMENTS INC78 citations97
US6773930B2Aug 10, 2004
Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier
TEXAS INSTRUMENTS INC32 citations89
US6767750B2Jul 27, 2004
Detection of AIOx ears for process control in FeRAM processing
TEXAS INSTRUMENTS INC10 citations68