Inventor

TAYLOR YOUSUN KIM

US2 patents

Patents

2 patents

US7682985B2Mar 23, 2010

Dual doped polysilicon and silicon germanium etch

LAM RES CORP7 citations69

US6923920B2Aug 2, 2005

Method and compositions for hardening photoresist in etching processes

LAM RES CORP5 citations54