Inventor

LEE CHRIS G N

US3 patents

Patents

3 patents

US7425277B1Sep 16, 2008

Method for hard mask CD trim

LAM RES CORP4 citations60

US6923920B2Aug 2, 2005

Method and compositions for hardening photoresist in etching processes

LAM RES CORP5 citations54

US7667281B2Feb 23, 2010

Method for hard mask CD trim

LAM RES CORP0 citations49