Inventor
BRUSIC VLASTA
US19 patents
⚠️ This page may combine multiple inventors who share the name “BRUSIC VLASTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
11 patentsUS7998335B2Aug 16, 2011
Controlled electrochemical polishing method
CABOT MICROELECTRONICS CORP77 citations97
US6527622B1Mar 4, 2003
CMP method for noble metals
CABOT MICROELECTRONICS CORP131 citations96
US7265055B2Sep 4, 2007
CMP of copper/ruthenium substrates
CABOT MICROELECTRONICS CORP33 citations92
US7097541B2Aug 29, 2006
CMP method for noble metals
CABOT MICROELECTRONICS CORP23 citations87
US7004819B2Feb 28, 2006
CMP systems and methods utilizing amine-containing polymers
CABOT MICROELECTRONICS CORP13 citations84
US7161247B2Jan 9, 2007
Polishing composition for noble metals
CABOT MICROELECTRONICS CORP18 citations82
US7160807B2Jan 9, 2007
CMP of noble metals
CABOT MICROELECTRONICS CORP12 citations82
US7288021B2Oct 30, 2007
Chemical-mechanical polishing of metals in an oxidized form
CABOT MICROELECTRONICS CORP7 citations72
US6853474B2Feb 8, 2005
Process for fabricating optical switches
CABOT MICROELECTRONICS CORP3 citations63
US8623767B2Jan 7, 2014
Method for polishing aluminum/copper and titanium in damascene structures
CABOT MICROELECTRONICS CORP0 citations52
US7368066B2May 6, 2008
Gold CMP composition and method
CABOT MICROELECTRONICS CORP0 citations52
BRUSIC VLASTA
3 patentsUS9343330B2May 17, 2016
Compositions for polishing aluminum/copper and titanium in damascene structures
BRUSIC VLASTA41 citations92
US8062096B2Nov 22, 2011
Use of CMP for aluminum mirror and solar cell fabrication
BRUSIC VLASTA10 citations77
US8425797B2Apr 23, 2013
Compositions for polishing aluminum/copper and titanium in damascene structures
BRUSIC VLASTA1 citations51