Inventor
BAYER BENJAMIN P
US6 patents
⚠️ This page may combine multiple inventors who share the name “BAYER BENJAMIN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
4 patentsUS7097541B2Aug 29, 2006
CMP method for noble metals
CABOT MICROELECTRONICS CORP23 citations87
US7160807B2Jan 9, 2007
CMP of noble metals
CABOT MICROELECTRONICS CORP12 citations82
US7161247B2Jan 9, 2007
Polishing composition for noble metals
CABOT MICROELECTRONICS CORP18 citations82
US7288021B2Oct 30, 2007
Chemical-mechanical polishing of metals in an oxidized form
CABOT MICROELECTRONICS CORP7 citations72