Inventor
TAKEMI MASAYOSHI
JP21 patents
Patents
21 patentsUS5782979AJul 21, 1998
Substrate holder for MOCVD
MITSUBISHI ELECTRIC CORP584 citations98
US5872022AFeb 16, 1999
Method for etching a semiconductor method for fabricating semiconductor device method for fabricating semiconductor laser and semiconductor laser
MITSUBISHI ELECTRIC CORP41 citations92
US5800622ASep 1, 1998
Vapor-phase growth apparatus and compound semiconductor device fabricated thereby
MITSUBISHI ELECTRIC CORP46 citations92
US5728215AMar 17, 1998
Method for forming a film by selective area MOCVD growth
MITSUBISHI ELECTRIC CORP23 citations92
US5539763AJul 23, 1996
Semiconductor lasers and methods for fabricating semiconductor lasers
MITSUBISHI ELECTRIC CORP40 citations92
US5530732AJun 25, 1996
Method and apparatus for evaluating thin-film multilayer structure
MITSUBISHI ELECTRIC CORP37 citations92
US5748659AMay 5, 1998
Semiconductor laser device
MITSUBISHI ELECTRIC CORP12 citations74
US7763486B2Jul 27, 2010
Method for manufacturing nitride semiconductor stacked structure and semiconductor light-emitting device
MITSUBISHI ELECTRIC CORP7 citations73
US5805629ASep 8, 1998
Semiconductor laser
MITSUBISHI ELECTRIC CORP7 citations73
US5383216AJan 17, 1995
Semiconductor laser with light modulator
MITSUBISHI ELECTRIC CORP14 citations73
US7436870B2Oct 14, 2008
Semiconductor laser device and method for manufacturing the same
MITSUBISHI ELECTRIC CORP4 citations63
US7923742B2Apr 12, 2011
Method for production of a nitride semiconductor laminated structure and an optical semiconductor device
MITSUBISHI ELECTRIC CORP2 citations62
US7825012B2Nov 2, 2010
Method for manufacturing nitride semiconductor device
MITSUBISHI ELECTRIC CORP3 citations62
US7590158B2Sep 15, 2009
Semiconductor laser having an improved window layer and method for the same
MITSUBISHI ELECTRIC CORP4 citations62
US5394417AFeb 28, 1995
Semiconductor laser producing visible light
MITSUBISHI ELECTRIC CORP4 citations62
US7298769B2Nov 20, 2007
Semiconductor laser
MITSUBISHI ELECTRIC CORP2 citations61
US7061963B2Jun 13, 2006
Semiconductor laser device
MITSUBISHI ELECTRIC CORP2 citations55
US7564076B2Jul 21, 2009
Semiconductor device and manufacturing method therefor
MITSUBISHI ELECTRIC CORP0 citations52
US7394114B2Jul 1, 2008
Semiconductor device and manufacturing method therefor
MITSUBISHI ELECTRIC CORP0 citations52
US7632695B2Dec 15, 2009
Semiconductor device manufacturing method
MITSUBISHI ELECTRIC CORP0 citations51
US7172429B2Feb 6, 2007
Method of manufacturing semiconductor light emitting device
MITSUBISHI ELECTRIC CORP0 citations41