Inventor
KOSAKA NOBUYUKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KOSAKA NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
8 patentsUS5534073AJul 9, 1996
Semiconductor producing apparatus comprising wafer vacuum chucking device
MITSUBISHI ELECTRIC CORP213 citations98
US5976260ANov 2, 1999
Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus
MITSUBISHI ELECTRIC CORP48 citations95
US5317618AMay 31, 1994
Light transmission type vacuum separating window and soft X-ray transmitting window
MITSUBISHI ELECTRIC CORP54 citations94
US5481095AJan 2, 1996
Code reading pattern and an image pickup apparatus for reading the pattern
MITSUBISHI ELECTRIC CORP21 citations92
US5289260AFeb 22, 1994
Pattern defect detection device and a spatial frequency filter used therein
MITSUBISHI ELECTRIC CORP25 citations92
US5379150AJan 3, 1995
Method of manufacturing a spatial frequency filter for use in a pattern defect detection device
MITSUBISHI ELECTRIC CORP13 citations73
US5170063ADec 8, 1992
Inspection device for detecting defects in a periodic pattern on a semiconductor wafer
MITSUBISHI ELECTRIC CORP15 citations73
US5305366AApr 19, 1994
Thin film forming apparatus
MITSUBISHI ELECTRIC CORP9 citations72