Inventor

WU CHUN-CHEN

TW2 patents

Patents

2 patents

US7547568B2Jun 16, 2009

Electrical conditioning of MEMS device and insulating layer thereof

QUALCOMM MEMS TECHNOLOGIES INC19 citations89

US7932728B2Apr 26, 2011

Electrical conditioning of MEMS device and insulating layer thereof

QUALCOMM MEMS TECHNOLOGIES INC5 citations70