Inventor
HERRIN RUSSELL T
US23 patents
⚠️ This page may combine multiple inventors who share the name “HERRIN RUSSELL T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
15 patentsUS9862598B2Jan 9, 2018
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM20 citations98
US9815690B2Nov 14, 2017
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM26 citations98
US10414646B2Sep 17, 2019
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM7 citations92
US10093537B2Oct 9, 2018
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM6 citations92
US11021364B2Jun 1, 2021
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM0 citations73
US10906803B2Feb 2, 2021
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM0 citations73
US9397174B2Jul 19, 2016
Self-aligned gate electrode diffusion barriers
IBM3 citations72
US10173889B2Jan 8, 2019
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM0 citations63
US9890039B2Feb 13, 2018
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM0 citations63
US9764944B2Sep 19, 2017
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM0 citations63
US9493343B2Nov 15, 2016
Planar cavity MEMS and related structures, methods of manufacture and design structures
IBM0 citations63
US8039356B2Oct 18, 2011
Through silicon via lithographic alignment and registration
IBM6 citations63
US8916952B2Dec 23, 2014
Self-aligned emitter-base in advanced BiCMOS technology
IBM0 citations52
US8673726B2Mar 18, 2014
Transistor structure with a sidewall-defined intrinsic base to extrinsic base link-up region and method of forming the transistor
IBM0 citations52
US8932920B2Jan 13, 2015
Self-aligned gate electrode diffusion barriers
IBM0 citations51
HERRIN RUSSELL T
3 patentsUS8956903B2Feb 17, 2015
Planar cavity MEMS and related structures, methods of manufacture and design structures
HERRIN RUSSELL T37 citations98
US9330856B2May 3, 2016
Methods of manufacture for micro-electro-mechanical system (MEMS)
HERRIN RUSSELL T29 citations97
US8796058B2Aug 5, 2014
Semiconductor structure
HERRIN RUSSELL T0 citations45