Inventor
LEE HEA-YUN
KR4 patents
⚠️ This page may combine multiple inventors who share the name “LEE HEA-YUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHOI JIN
3 patentsUS8563951B2Oct 22, 2013
Exposure systems for integrated circuit fabrication
CHOI JIN1 citations49
US8697317B2Apr 15, 2014
Exposure apparatus for forming a reticle and method of forming a reticle using the same
CHOI JIN1 citations48
US8609305B2Dec 17, 2013
Methods of forming a photolithography reticle
CHOI JIN0 citations37