Inventor
ITO KIYOHITO
US8 patents
⚠️ This page may combine multiple inventors who share the name “ITO KIYOHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS9443731B1Sep 13, 2016
Material processing to achieve sub-10nm patterning
TOKYO ELECTRON LTD21 citations91
US9257280B2Feb 9, 2016
Mitigation of asymmetrical profile in self aligned patterning etch
TOKYO ELECTRON LTD5 citations71
US11380545B2Jul 5, 2022
Processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations69
US10886138B2Jan 5, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations57
US11728176B2Aug 15, 2023
Treatment method
TOKYO ELECTRON LTD0 citations50
US10950458B2Mar 16, 2021
Etching method
TOKYO ELECTRON LTD0 citations48
US9576812B2Feb 21, 2017
Partial etch memorization via flash addition
TOKYO ELECTRON LTD0 citations39