Inventor
KANEYAMA KOJI
JP43 patents
⚠️ This page may combine multiple inventors who share the name “KANEYAMA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
21 patentsUS11139192B2Oct 5, 2021
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD3 citations73
US11004702B2May 11, 2021
Film processing unit and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations73
US10591820B2Mar 17, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD3 citations73
US12583019B2Mar 24, 2026
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations62
US12508623B2Dec 30, 2025
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations62
US12119242B2Oct 15, 2024
Film processing method
SCREEN HOLDINGS CO LTD0 citations62
US11986853B2May 21, 2024
Substrate processing apparatus, film formation unit, substrate processing method and film formation method
SCREEN HOLDINGS CO LTD1 citations62
US11590540B2Feb 28, 2023
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations62
US11260429B2Mar 1, 2022
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations62
US11243469B2Feb 8, 2022
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10854480B2Dec 1, 2020
Film processing unit, substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US10832925B2Nov 10, 2020
Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing method
SCREEN HOLDINGS CO LTD1 citations62
US12035576B2Jul 9, 2024
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD0 citations52
US10684548B2Jun 16, 2020
Developing method
SCREEN HOLDINGS CO LTD0 citations52
US10395942B2Aug 27, 2019
Etching device, substrate processing apparatus, etching method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations52
US10185219B2Jan 22, 2019
Developing method
SCREEN HOLDINGS CO LTD0 citations52
US10955745B2Mar 23, 2021
Exposure device, substrate processing apparatus, exposure method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US10754251B2Aug 25, 2020
Development unit, substrate processing apparatus, development method and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41
US10331034B2Jun 25, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations41
US10042262B2Aug 7, 2018
Negative developing method and negative developing apparatus
SCREEN HOLDINGS CO LTD0 citations41
US10539877B2Jan 21, 2020
Developing method
SCREEN HOLDINGS CO LTD0 citations37
SOKUDO CO LTD
6 patentsUS7497633B2Mar 3, 2009
Substrate processing apparatus and substrate processing method
SOKUDO CO LTD42 citations92
US8034190B2Oct 11, 2011
Substrate processing apparatus and substrate processing method
SOKUDO CO LTD22 citations91
US7604424B2Oct 20, 2009
Substrate processing apparatus
SOKUDO CO LTD29 citations90
US7766565B2Aug 3, 2010
Substrate drying apparatus, substrate cleaning apparatus and substrate processing system
SOKUDO CO LTD2 citations62
US7726891B2Jun 1, 2010
Substrate processing apparatus and substrate processing method
SOKUDO CO LTD2 citations62
US8040488B2Oct 18, 2011
Substrate processing apparatus
SOKUDO CO LTD3 citations61
KANEYAMA KOJI
6 patentsUS9064914B2Jun 23, 2015
Method of and apparatus for heat-treating exposed substrate
KANEYAMA KOJI4 citations72
US8496761B2Jul 30, 2013
Substrate processing apparatus and substrate processing method
KANEYAMA KOJI5 citations72
US8635968B2Jan 28, 2014
Substrate processing apparatus and substrate processing method
KANEYAMA KOJI3 citations62
US8932672B2Jan 13, 2015
Substrate processing apparatus
KANEYAMA KOJI2 citations61
US8540824B2Sep 24, 2013
Substrate processing method
KANEYAMA KOJI3 citations61
US8851769B2Oct 7, 2014
Substrate processing method
KANEYAMA KOJI0 citations51
DAINIPPON SCREEN MFG
3 patentsUS7658560B2Feb 9, 2010
Substrate processing apparatus
DAINIPPON SCREEN MFG10 citations84
US6913781B2Jul 5, 2005
Substrate processing apparatus and method including a device for applying a coating and a device for measuring the film quality of the coating
DAINIPPON SCREEN MFG7 citations73
US8356424B2Jan 22, 2013
Substrate processing method
DAINIPPON SCREEN MFG2 citations62
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD
3 patentsUS10047441B2Aug 14, 2018
Substrate processing apparatus and substrate processing method
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD1 citations62
US9828676B2Nov 28, 2017
Substrate processing apparatus and substrate processing method
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD0 citations51
US9477162B2Oct 25, 2016
Substrate processing method
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD0 citations51