Inventor
SHIGENAI TAKEKAZU
JP2 patents
Patents
2 patentsUS8877520B2Nov 4, 2014
Ferroelectric film containing a perovskite structure oxide and method for manufacturing a ferroelectric film
YOUTEC CO LTD1 citations46
US9903898B2Feb 27, 2018
Thermal poling method, piezoelectric film and manufacturing method of same, thermal poling apparatus, and inspection method of piezoelectric property
YOUTEC CO LTD1 citations44