Inventor
WALD CHRISTIAN
DE16 patents
⚠️ This page may combine multiple inventors who share the name “WALD CHRISTIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
8 patentsUS9939730B2Apr 10, 2018
Optical assembly
ZEISS CARL SMT GMBH7 citations82
US9671548B2Jun 6, 2017
Optical waveguide for guiding illumination light
ZEISS CARL SMT GMBH8 citations81
US9442381B2Sep 13, 2016
Method of operating a projection exposure tool for microlithography
ZEISS CARL SMT GMBH4 citations73
US10001631B2Jun 19, 2018
Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element
ZEISS CARL SMT GMBH6 citations70
US10852642B2Dec 1, 2020
Control apparatus and method for controlling a manipulator in respect of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH2 citations63
US10241423B2Mar 26, 2019
Method of operating a projection exposure tool for microlithography
ZEISS CARL SMT GMBH0 citations52
US10254466B2Apr 9, 2019
Optical waveguide for guiding illumination light
ZEISS CARL SMT GMBH0 citations49
US9841685B2Dec 12, 2017
Determination of a corrected variable
ZEISS CARL SMT GMBH0 citations37
FRAUNHOFER GES FORSCHUNG
6 patentsUS10845274B2Nov 24, 2020
Device having a micro fluid actuator
FRAUNHOFER GES FORSCHUNG3 citations71
US11111911B2Sep 7, 2021
Degassing apparatus
FRAUNHOFER GES FORSCHUNG2 citations65
US10792430B2Oct 6, 2020
Free-jet dosing system for applying a fluid into or under the skin
FRAUNHOFER GES FORSCHUNG1 citations62
US11555725B2Jan 17, 2023
Microstructured fluid flow control device
FRAUNHOFER GES FORSCHUNG1 citations60
US11399978B2Aug 2, 2022
Free jet dosage system for the eye
FRAUNHOFER GES FORSCHUNG1 citations58
US12404849B2Sep 2, 2025
Micromembrane pumping device
FRAUNHOFER GES FORSCHUNG1 citations54