Inventor
HO BANGCHING
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HO BANGCHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAKAMOTO RIKIMARU
5 patentsUS10437150B2Oct 8, 2019
Composition for forming resist underlayer film with reduced outgassing
SAKAMOTO RIKIMARU2 citations71
US8722840B2May 13, 2014
Resist underlayer film forming composition, and method for forming resist pattern using the same
SAKAMOTO RIKIMARU6 citations71
US11675269B2Jun 13, 2023
Composition for forming resist overlayer film for EUV lithography
SAKAMOTO RIKIMARU0 citations50
US9240327B2Jan 19, 2016
Resist underlayer film-forming composition for EUV lithography containing condensation polymer
SAKAMOTO RIKIMARU1 citations50
US9753369B2Sep 5, 2017
Polymer-containing developer
SAKAMOTO RIKIMARU0 citations39
NISSAN CHEMICAL IND LTD
3 patentsUS9005873B2Apr 14, 2015
Composition for forming resist underlayer film for EUV lithography
NISSAN CHEMICAL IND LTD11 citations83
US9627217B2Apr 18, 2017
Silicon-containing EUV resist underlayer film-forming composition including additive
NISSAN CHEMICAL IND LTD2 citations71
US9494864B2Nov 15, 2016
Resist overlayer film forming composition for lithography and method for manufacturing semiconductor device using the same
NISSAN CHEMICAL IND LTD1 citations50