Inventor
KASAHARA KAZUKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KASAHARA KAZUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
8 patentsUS9046765B2Jun 2, 2015
Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film
JSR CORP2 citations61
US9513548B2Dec 6, 2016
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
JSR CORP2 citations60
US12372869B2Jul 29, 2025
Method for forming resist pattern and radiation-sensitive resin composition
JSR CORP0 citations58
US10048586B2Aug 14, 2018
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
JSR CORP0 citations51
US9158196B2Oct 13, 2015
Radiation-sensitive resin composition and pattern-forming method
JSR CORP1 citations51
US10108088B2Oct 23, 2018
Radiation-sensitive composition and pattern-forming method
JSR CORP0 citations50
US10120277B2Nov 6, 2018
Radiation-sensitive composition and pattern-forming method
JSR CORP0 citations44
US9329474B2May 3, 2016
Photoresist composition and resist pattern-forming method
JSR CORP0 citations40