Inventor

PRINTZ WALLACE P

US18 patents

⚠️ This page may combine multiple inventors who share the name “PRINTZ WALLACE P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PRINTZ WALLACE P

TOKYO ELECTRON LTD

Dual tone development with plural photo-acid generators in lithographic applications

Controlling cleaning of a layer on a substrate using nozzles

Photo-sensitized chemically amplified resist (PS-CAR) simulation

Colloidal silica growth inhibitor and associated method and system

Cover plate for wind mark control in spin coating process

Method and system of process chemical temperature control using an injection nozzle

Process and apparatus for processing a nitride structure without silica deposition

Process and apparatus for processing a nitride structure without silica deposition

Colloidal silica growth inhibitor and associated method and system

Systems and methodologies for vapor phase hydroxyl radical processing of substrates

Method and apparatus for dynamic control of the temperature of a wet etch process

Etch system and method for single substrate processing

Method of treating a microelectronic substrate using dilute TMAH

Chemical fluid processing apparatus and chemical fluid processing method

FONSECA CARLOS A

Dual tone development with a photo-activated acid enhancement component in lithographic applications

Flood exposure process for dual tone development in lithographic applications

BROWN IAN J

Etch system and method for single substrate processing

Sequential stage mixing for a resist batch strip process