Inventor
BASSETT DEREK W
US3 patents
Patents
3 patentsUS10262880B2Apr 16, 2019
Cover plate for wind mark control in spin coating process
TOKYO ELECTRON LTD4 citations70
US10256163B2Apr 9, 2019
Method of treating a microelectronic substrate using dilute TMAH
TOKYO ELECTRON LTD0 citations50
US10062586B2Aug 28, 2018
Chemical fluid processing apparatus and chemical fluid processing method
TOKYO ELECTRON LTD0 citations39