Inventor
WU MING-FA
TW8 patents
⚠️ This page may combine multiple inventors who share the name “WU MING-FA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS11530479B2Dec 20, 2022
Atomic layer deposition tool and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11219115B2Jan 4, 2022
EUV collector contamination prevention
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10631392B2Apr 21, 2020
EUV collector contamination prevention
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12371780B2Jul 29, 2025
Vacuum systems in semiconductor fabrication facilities
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11525185B2Dec 13, 2022
Vacuum systems in semiconductor fabrication facilities
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12359313B2Jul 15, 2025
Deposition apparatus and method of forming metal oxide layer using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US12331398B2Jun 17, 2025
Method of forming metal oxide layer using deposition apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55