P

Inventor

PRINCE MATTHEW J

US29 patents
⚠️ This page may combine multiple inventors who share the name “PRINCE MATTHEW J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTEL CORP

15 patents
US5635083AJun 3, 1997

Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate

INTEL CORP169 citations98
US5216843AJun 8, 1993

Polishing pad conditioning apparatus for wafer planarization process

INTEL CORP390 citations96
US7271045B2Sep 18, 2007

Etch stop and hard mask film property matching to enable improved replacement metal gate process

INTEL CORP45 citations92
US7166506B2Jan 23, 2007

Poly open polish process

INTEL CORP34 citations92
US6951506B2Oct 4, 2005

Polish pad with non-uniform groove depth to improve wafer polish rate uniformity

INTEL CORP16 citations92
US6093651AJul 25, 2000

Polish pad with non-uniform groove depth to improve wafer polish rate uniformity

INTEL CORP40 citations92
US10847423B2Nov 24, 2020

Techniques and configurations to reduce transistor gate short defects

INTEL CORP4 citations83
US6083089AJul 4, 2000

Method and apparatus for chemical mechanical polishing

INTEL CORP11 citations73
US10468305B2Nov 5, 2019

Techniques and configurations to reduce transistor gate short defects

INTEL CORP2 citations72
US7125321B2Oct 24, 2006

Multi-platen multi-slurry chemical mechanical polishing process

INTEL CORP7 citations69
US12094780B2Sep 17, 2024

Techniques and configurations to reduce transistor gate short defects

INTEL CORP0 citations62
US11756833B2Sep 12, 2023

Techniques and configurations to reduce transistor gate short defects

INTEL CORP0 citations62
US11380592B2Jul 5, 2022

Techniques and configurations to reduce transistor gate short defects

INTEL CORP0 citations62
US9761497B2Sep 12, 2017

Techniques and configurations to reduce transistor gate short defects

INTEL CORP0 citations51
US9281401B2Mar 8, 2016

Techniques and configurations to reduce transistor gate short defects

INTEL CORP0 citations51

BARD ACCESS SYSTEMS INC

13 patents

BARD INC C R

1 patent