Inventor
ENGELEN WOUTER JOEP
NL12 patents
Patents
12 patentsUS9728931B2Aug 8, 2017
Electron injector and free electron laser
ASML NETHERLANDS BV5 citations81
US10884339B2Jan 5, 2021
Lithographic method
ASML NETHERLANDS BV3 citations72
US10437154B2Oct 8, 2019
Lithographic method
ASML NETHERLANDS BV2 citations71
US9823572B2Nov 21, 2017
Lithographic method
ASML NETHERLANDS BV2 citations71
US10580545B2Mar 3, 2020
Beam delivery apparatus and method
ASML NETHERLANDS BV6 citations70
US9853412B2Dec 26, 2017
Radiation source
ASML NETHERLANDS BV4 citations69
US12271008B2Apr 8, 2025
Transmissive diffusor
ASML NETHERLANDS BV0 citations61
US10401723B2Sep 3, 2019
Patterning device
ASML NETHERLANDS BV1 citations57
US11960215B2Apr 16, 2024
Radiation filter for a radiation sensor
ASML NETHERLANDS BV0 citations50
US10468225B2Nov 5, 2019
Electron source for a free electron laser
ASML NETHERLANDS BV0 citations50
US10103508B2Oct 16, 2018
Electron injector and free electron laser
ASML NETHERLANDS BV0 citations49
US10732498B2Aug 4, 2020
Patterning device
ASML NETHERLANDS BV0 citations47