Inventor
MIZUNO AYAKO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MIZUNO AYAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
4 patentsUS6284020B1Sep 4, 2001
Method of maintaining cleanliness of substrates and box for accommodating substrates
TOSHIBA KK32 citations90
US7889313B2Feb 15, 2011
Immersion lithography apparatus and exposure method
TOSHIBA KK2 citations60
US7850752B2Dec 14, 2010
Semiconductor manufacturing system and method of manufacturing semiconductor device
TOSHIBA KK1 citations50
US9658203B2May 23, 2017
Metal collection solution and method of analyzing substrate contamination
TOSHIBA KK0 citations49