Inventor
KURI MASAHIRO
JP6 patents
Patents
6 patentsUS10421283B2Sep 24, 2019
Ejection material receiving unit, ejection material ejecting apparatus, and manufacturing method of flexible member
CANON KK2 citations71
US11267252B2Mar 8, 2022
Ejection apparatus and imprint apparatus
CANON KK0 citations60
US11097545B2Aug 24, 2021
Liquid ejection device, cleaning apparatus and cleaning method for module substrate
CANON KK1 citations60
US12502894B2Dec 23, 2025
Liquid discharge apparatus, substrate processing apparatus and article manufacturing method
CANON KK0 citations56
US12083791B2Sep 10, 2024
Liquid discharge device and imprint apparatus
CANON KK0 citations56
US11669010B2Jun 6, 2023
Ejection material ejecting device and imprint apparatus
CANON KK0 citations49