Inventor
PHILLIPS RICHARD
US29 patents
⚠️ This page may combine multiple inventors who share the name “PHILLIPS RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS10269559B2Apr 23, 2019
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
LAM RES CORP28 citations93
US10629435B2Apr 21, 2020
Doped ALD films for semiconductor patterning applications
LAM RES CORP9 citations84
US10658172B2May 19, 2020
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
LAM RES CORP7 citations83
US10403474B2Sep 3, 2019
Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system
LAM RES CORP10 citations82
US10431451B2Oct 1, 2019
Methods and apparatuses for increasing reactor processing batch size
LAM RES CORP2 citations73
US11286560B2Mar 29, 2022
Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matching
LAM RES CORP2 citations69
US10697059B2Jun 30, 2020
Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matching
LAM RES CORP3 citations69
US10840061B2Nov 17, 2020
Substrate processing chamber including conical surface for reducing recirculation
LAM RES CORP1 citations61
US12110586B2Oct 8, 2024
Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers
LAM RES CORP0 citations51
YASA LTD
5 patentsUS12062957B2Aug 13, 2024
Axial flux machine shoe optimisation
YASA LTD2 citations70
US11276622B2Mar 15, 2022
Inverter arrangement
YASA LTD4 citations69
US12057749B2Aug 6, 2024
Stator assembly flux alignment
YASA LTD2 citations66
US12294318B2May 6, 2025
Controller for an axial flux machine and method
YASA LTD0 citations51
US11757374B2Sep 12, 2023
Method and apparatus for generating a three-phase voltage
YASA LTD0 citations48