Inventor
SAKAZAKI TETSUYA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SAKAZAKI TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS11545367B2Jan 3, 2023
Substrate processing apparatus, substrate processing method, and chemical liquid
TOKYO ELECTRON LTD2 citations70
US11306249B2Apr 19, 2022
Substrate processing method, substrate processing device and etching liquid
TOKYO ELECTRON LTD2 citations70
US12203021B2Jan 21, 2025
Substrate processing device and etching liquid
TOKYO ELECTRON LTD0 citations60
US12371796B2Jul 29, 2025
Substrate processing apparatus, substrate processing method, and chemical liquid
TOKYO ELECTRON LTD0 citations59
US11915941B2Feb 27, 2024
Dynamically adjusted purge timing in wet atomic layer etching
TOKYO ELECTRON LTD0 citations50