Inventor
KAGAWA KOJI
JP13 patents
Patents
13 patentsUS10121646B2Nov 6, 2018
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD2 citations72
US11306249B2Apr 19, 2022
Substrate processing method, substrate processing device and etching liquid
TOKYO ELECTRON LTD2 citations70
US10381233B2Aug 13, 2019
Method and apparatus for substrate processing
TOKYO ELECTRON LTD5 citations68
US11626294B2Apr 11, 2023
Substrate processing method, substrate processing apparatus and recording medium
TOKYO ELECTRON LTD0 citations61
US12506012B2Dec 23, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US12203021B2Jan 21, 2025
Substrate processing device and etching liquid
TOKYO ELECTRON LTD0 citations60
US11551941B2Jan 10, 2023
Substrate cleaning method
TOKYO ELECTRON LTD1 citations60
US10985026B2Apr 20, 2021
Substrate processing method, substrate processing apparatus, and substrate processing system
TOKYO ELECTRON LTD0 citations60
US11049723B2Jun 29, 2021
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations59
US12020943B2Jun 25, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US11551931B2Jan 10, 2023
Substrate processing apparatus, substrate processing method, and storage medium storing program for executing substrate processing method
TOKYO ELECTRON LTD0 citations51
US9870914B2Jan 16, 2018
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations51
US11875991B2Jan 16, 2024
Substrate treatment method and substrate treatment device
TOKYO ELECTRON LTD0 citations49