Inventor
SHAMOTO MITSUHIRO
JP9 patents
Patents
9 patentsUS11319642B2May 3, 2022
Method for determining location of power feeding point in electroplating apparatus and electroplating apparatus for plating rectangular substrate
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US10934630B2Mar 2, 2021
Method for determining location of power feeding point in electroplating apparatus and electroplating apparatus for plating rectangular substrate
EBARA CORP0 citations61
US11725296B2Aug 15, 2023
Plate, plating apparatus, and method of manufacturing plate
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US10982348B2Apr 20, 2021
Plating apparatus
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US11603601B2Mar 14, 2023
Plating device and resistor
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US10968530B2Apr 6, 2021
Electroplating device
EBARA CORP0 citations50
US11773504B2Oct 3, 2023
Plating support system, plating support device, and recording medium
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US10829865B2Nov 10, 2020
Paddle for use of stirring plating solution and plating apparatus including paddle
EBARA CORP0 citations47
US10768140B2Sep 8, 2020
Plating analysis method, plating analysis system, and computer readable storage medium for plating analysis
EBARA CORP0 citations39