Inventor

FINKELMAN ALEX

US3 patents

⚠️ This page may combine multiple inventors who share the name “FINKELMAN ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EUGENUS INC

2 patents

US11328944B2May 10, 2022

Systems and methods of placing substrates in semiconductor manufacturing equipment

EUGENUS INC0 citations49

US11459654B2Oct 4, 2022

Liquid precursor injection for thin film deposition

EUGENUS INC0 citations47

LAM RES CORP

1 patent

US6306019B1Oct 23, 2001

Method and apparatus for conditioning a polishing pad

LAM RES CORP23 citations84