Inventor
WRIGHT JR ROBERT
US9 patents
Patents
9 patentsUS11560625B2Jan 24, 2023
Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor
ENTEGRIS INC0 citations62
US12258356B2Mar 25, 2025
Group VI precursor compounds
ENTEGRIS INC0 citations60
US12252787B2Mar 18, 2025
Methods for depositing tungsten or molybdenum films
ENTEGRIS INC0 citations60
US11807653B2Nov 7, 2023
Group VI precursor compounds
ENTEGRIS INC0 citations60
US11761081B2Sep 19, 2023
Methods for depositing tungsten or molybdenum films
ENTEGRIS INC1 citations60
US11746413B2Sep 5, 2023
Chemical delivery system and method of operating the chemical delivery system
ENTEGRIS INC0 citations60
US11421320B2Aug 23, 2022
Chemical delivery system and method of operating the chemical delivery system
ENTEGRIS INC0 citations60
US11352383B2Jun 7, 2022
Group VI precursor compounds
ENTEGRIS INC0 citations60
US12312678B2May 27, 2025
Methods for depositing a tungsten or molybdenum layer in the presence of a reducing co-reactant
ENTEGRIS INC0 citations46