Inventor

CHEN PHILIP S H

US33 patents

⚠️ This page may combine multiple inventors who share the name “CHEN PHILIP S H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN PHILIP S H

ENTEGRIS INC

Tellurium compounds useful for deposition of tellurium containing materials

ALD processes for low leakage current and low equivalent oxide thickness BiTaO films

Chemical vapor deposition processes using ruthenium precursor and reducing gas

Cobalt CVD

Vapor deposition precursor compounds and process of use

Chemical vapor deposition processes using ruthenium precursor and reducing gas

Antimony and germanium complexes useful for CVD/ALD of metal thin films

Cobalt precursors

Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor

Group VI metal deposition process

Methods for depositing tungsten or molybdenum films

Vapor deposition precursor compounds and process of use

Methods for depositing tungsten or molybdenum films

CVD Mo deposition by using MoOCl4

Cobalt deposition selectivity on copper and dielectrics

Alloys of Co to reduce stress

Silicon precursor compounds and method for forming silicon-containing films

ADVANCED TECH MATERIALS

Antimony and germanium complexes useful for CVD/ALD of metal thin films

Apparatus and process for sensing fluoro species in semiconductor processing systems

Apparatus and process for sensing fluoro species in semiconductor processing systems

Apparatus and process for sensing fluoro species in semiconductor processing systems

Antimony and germanium complexes useful for CVD/ALD of metal thin films

Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same

Apparatus and process for sensing target gas species in semiconductor processing systems

Tellurium compounds useful for deposition of tellurium containing materials

Antimony and germanium complexes useful for CVD/ALD of metal thin films

Antimony compounds useful for deposition of antimony-containing materials

HUNKS WILLIAM

Antimony and germanium complexes useful for CVD/ALD of metal thin films

ZHENG JUN-FEI

High concentration nitrogen-containing germanium telluride based memory devices and processes of making

MST TECHNOLOGY GMBH

Gas sensor with attenuated drift characteristic

CHEN PHILIP S H

Amorphous Ge/Te deposition process

DIMEO JR FRANK

Apparatus and process for sensing fluoro species in semiconductor processing systems

CHEN TIANNIU

Antimony compounds useful for deposition of antimony-containing materials