Inventor
JENSEN ALAN J
US14 patents
⚠️ This page may combine multiple inventors who share the name “JENSEN ALAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS6261168B1Jul 17, 2001
Chemical mechanical planarization or polishing pad with sections having varied groove patterns
LAM RES CORP89 citations96
US6585579B2Jul 1, 2003
Chemical mechanical planarization or polishing pad with sections having varied groove patterns
LAM RES CORP61 citations94
US11551938B2Jan 10, 2023
Alternating etch and passivation process
LAM RES CORP13 citations93
US11848212B2Dec 19, 2023
Alternating etch and passivation process
LAM RES CORP10 citations84
US6875091B2Apr 5, 2005
Method and apparatus for conditioning a polishing pad with sonic energy
LAM RES CORP12 citations79
US12293919B2May 6, 2025
Alternating etch and passivation process
LAM RES CORP3 citations73
US6634936B2Oct 21, 2003
Chemical mechanical planarization or polishing pad with sections having varied groove patterns
LAM RES CORP7 citations72
US6939207B2Sep 6, 2005
Method and apparatus for controlling CMP pad surface finish
LAM RES CORP5 citations71
US6645052B2Nov 11, 2003
Method and apparatus for controlling CMP pad surface finish
LAM RES CORP12 citations71
US6752698B1Jun 22, 2004
Method and apparatus for conditioning fixed-abrasive polishing pads
LAM RES CORP8 citations69
US12532675B2Jan 20, 2026
Core removal
LAM RES CORP0 citations55
US12586765B2Mar 24, 2026
Surface modification for metal-containing photoresist deposition
LAM RES CORP0 citations51