Inventor
ROTHMAN LAURA B
US7 patents
Patents
7 patentsUS5346518ASep 13, 1994
Vapor drain system
IBM114 citations97
US4367119AJan 4, 1983
Planar multi-level metal process with built-in etch stop
IBM78 citations95
US4447824AMay 8, 1984
Planar multi-level metal process with built-in etch stop
IBM36 citations92
US4272561AJun 9, 1981
Hybrid process for SBD metallurgies
IBM34 citations92
US4222792ASep 16, 1980
Planar deep oxide isolation process utilizing resin glass and E-beam exposure
IBM101 citations92
US4396458AAug 2, 1983
Method for forming planar metal/insulator structures
IBM34 citations89
US4933635AJun 12, 1990
In-line process monitors for thin film wiring
IBM15 citations71