Inventor
STANDLEY CHARLES L
US6 patents
Patents
6 patentsUS4944836AJul 31, 1990
Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
IBM539 citations97
US4789648ADec 6, 1988
Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias
IBM526 citations97
US4367119AJan 4, 1983
Planar multi-level metal process with built-in etch stop
IBM78 citations95
US4447824AMay 8, 1984
Planar multi-level metal process with built-in etch stop
IBM36 citations92
US4439270AMar 27, 1984
Process for the controlled etching of tapered vias in borosilicate glass dielectrics
IBM50 citations89
US4601939AJul 22, 1986
Composite insulator structure
IBM10 citations67