Inventor
LIEBMANN LARS WOLFGANG
US7 patents
⚠️ This page may combine multiple inventors who share the name “LIEBMANN LARS WOLFGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6185727B1Feb 6, 2001
Design verification for asymmetric phase shift mask layouts
IBM107 citations96
US5740068AApr 14, 1998
Fidelity enhancement of lithographic and reactive-ion-etched images by optical proximity correction
IBM300 citations96
US5657235AAug 12, 1997
Continuous scale optical proximity correction by mask maker dose modulation
IBM104 citations94
US5877964AMar 2, 1999
Semiconductor device compensation system and method
IBM8 citations72
US6055367AApr 25, 2000
Semiconductor device compensation system and method
IBM4 citations61