Inventor
CHIU WEI-KAY
TW13 patents
Patents
13 patentsUS5858475AJan 12, 1999
Acoustic wave enhanced spin coating method
TAIWAN SEMICONDUCTOR MFG28 citations91
US6197481B1Mar 6, 2001
Wafer alignment marks protected by photoresist
TAIWAN SEMICONDUCTOR MFG12 citations73
US6137088AOct 24, 2000
Baking of photoresist on wafers
TAIWAN SEMICONDUCTOR MFG7 citations72
US6019844AFeb 1, 2000
Acoustic wave enhanced spin coater
TAIWAN SEMICONDUCTOR MFG8 citations72
US5876875AMar 2, 1999
Acoustic wave enhanced developer
TAIWAN SEMICONDUCTOR MFG7 citations72
US5849582ADec 15, 1998
Baking of photoresist on wafers
TAIWAN SEMICONDUCTOR MFG14 citations72
US6908514B2Jun 21, 2005
Wafer alignment marks protected by photoresist
TAIWAN SEMICONDUCTOR MFG4 citations62
US6575645B2Jun 10, 2003
Method and apparatus for improving resist pattern developing
TAIWAN SEMICONDUCTOR MFG2 citations61
US6355397B1Mar 12, 2002
Method and apparatus for improving resist pattern developing
TAIWAN SEMICONDUCTOR MFG4 citations61
US6010255AJan 4, 2000
Acoustic wave enhanced developer
TAIWAN SEMICONDUCTOR MFG4 citations61
US6664194B1Dec 16, 2003
Photoexposure method for facilitating photoresist stripping
TAIWAN SEMICONDUCTOR MFG0 citations51
US6537734B2Mar 25, 2003
Method and apparatus for improving resist pattern developing
TAIWAN SEMICONDUCTOR MFG0 citations51
US5838162ANov 17, 1998
Test apparatus and method for testing integrated circuit modules having visual display
TAIWAN SEMICONDUCTOR MFG1 citations48