Inventor
BRONGO MAUREEN R
US13 patents
⚠️ This page may combine multiple inventors who share the name “BRONGO MAUREEN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CONEXANT SYSTEMS INC
7 patentsUS6187672B1Feb 13, 2001
Interconnect with low dielectric constant insulators for semiconductor integrated circuit manufacturing
CONEXANT SYSTEMS INC512 citations99
US6245663B1Jun 12, 2001
IC interconnect structures and methods for making same
CONEXANT SYSTEMS INC129 citations98
US6271127B1Aug 7, 2001
Method for dual damascene process using electron beam and ion implantation cure methods for low dielectric constant materials
CONEXANT SYSTEMS INC101 citations97
US6383821B1May 7, 2002
Semiconductor device and process
CONEXANT SYSTEMS INC22 citations91
US6291361B1Sep 18, 2001
Method and apparatus for high-resolution in-situ plasma etching of inorganic and metal films
CONEXANT SYSTEMS INC17 citations91
US6251796B1Jun 26, 2001
Method for fabrication of ceramic tantalum nitride and improved structures based thereon
CONEXANT SYSTEMS INC23 citations91
US6328848B1Dec 11, 2001
Apparatus for high-resolution in-situ plasma etching of inorganic and metal films
CONEXANT SYSTEMS INC2 citations61
NEWPORT FAB LLC
5 patentsUS6984577B1Jan 10, 2006
Damascene interconnect structure and fabrication method having air gaps between metal lines and metal layers
NEWPORT FAB LLC61 citations96
US6627539B1Sep 30, 2003
Method of forming dual-damascene interconnect structures employing low-k dielectric materials
NEWPORT FAB LLC70 citations96
US6787911B1Sep 7, 2004
Interconnect with low dielectric constant insulators for semiconductor integrated circuit manufacturing
NEWPORT FAB LLC8 citations74
US6836400B2Dec 28, 2004
Structures based on ceramic tantalum nitride
NEWPORT FAB LLC7 citations72
US6798065B2Sep 28, 2004
Method and apparatus for high-resolution in-situ plasma etching of inorganic and metals films
NEWPORT FAB LLC4 citations61