Inventor
SEKINE YOSHIYUKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SEKINE YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS6307618B1Oct 23, 2001
Projection exposure apparatus and device manufacturing method including a projection optical system having a pair of diffractive members
CANON KK27 citations92
US6097472AAug 1, 2000
Apparatus and method for exposing a pattern on a ball-like device material
CANON KK28 citations92
US6441886B2Aug 27, 2002
Illumination optical system and exposure apparatus having the same
CANON KK16 citations84
US6731431B2May 4, 2004
Optical unit having plural optical elements
CANON KK11 citations73
US6600606B2Jul 29, 2003
Projection optical system with diffractive optical element
CANON KK10 citations73
US6417940B1Jul 9, 2002
Phase type computer hologram and optical instrument
CANON KK9 citations73
US6266192B1Jul 24, 2001
Projection exposure apparatus and device manufacturing method
CANON KK8 citations73
US7511888B2Mar 31, 2009
Projection optical system, exposure apparatus, device manufacturing method, and device manufactured by using the same
CANON KK5 citations62
US7430036B2Sep 30, 2008
Maskless exposure apparatus using optical modulator, and method for monitoring pattern generating performance by the optical modulator
CANON KK3 citations62
US7106455B2Sep 12, 2006
Interferometer and interferance measurement method
CANON KK5 citations62
US8027025B2Sep 27, 2011
Exposure apparatus and device manufacturing method
CANON KK1 citations51