Inventor
WANG XUAN-QI
US11 patents
Patents
11 patentsUS6345502B1Feb 12, 2002
Micromachined parylene membrane valve and pump
CALIFORNIA INST OF TECHN234 citations98
US6240962B1Jun 5, 2001
Parylene micro check valve and fabrication method thereof
CALIFORNIA INST OF TECHN117 citations98
US6709604B2Mar 23, 2004
Parylene micro check valve and fabrication method thereof
CALIFORNIA INST OF TECHN61 citations96
US6334761B1Jan 1, 2002
Check-valved silicon diaphragm pump and method of fabricating the same
CALIFORNIA INST OF TECHN69 citations95
US6699394B2Mar 2, 2004
Micromachined parylene membrane valve and pump
CALIFORNIA INST OF TECHN26 citations92
US6470904B1Oct 29, 2002
Normally closed in-channel micro check valve
CALIFORNIA INST OF TECHN27 citations92
US6511859B1Jan 28, 2003
IC-compatible parylene MEMS technology and its application in integrated sensors
CALIFORNIA INST OF TECHN17 citations83
US7297943B2Nov 20, 2007
Polymer based electrospray nozzle for mass spectrometry
CALIFORNIA INST OF TECHN10 citations80
US6536213B2Mar 25, 2003
Micromachined parylene membrane valve and pump
CALIFORNIA INST OF TECHN10 citations73
US6499297B2Dec 31, 2002
Micromachined parylene membrane valve and pump
CALIFORNIA INST OF TECHN6 citations73
US7692141B2Apr 6, 2010
Polymer based electrospray nozzle for mass spectrometry
CALIFORNIA INST OF TECHN2 citations59