Inventor
BERGER VADIM
DE16 patents
⚠️ This page may combine multiple inventors who share the name “BERGER VADIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAMBDA PHYSIK AG
11 patentsUS6466599B1Oct 15, 2002
Discharge unit for a high repetition rate excimer or molecular fluorine laser
LAMBDA PHYSIK AG28 citations92
US6414978B2Jul 2, 2002
Discharge unit for a high repetition rate excimer or molecular fluorine laser
LAMBDA PHYSIK AG14 citations92
US6757315B1Jun 29, 2004
Corona preionization assembly for a gas laser
LAMBDA PHYSIK AG21 citations89
US6965624B2Nov 15, 2005
Laser gas replenishment method
LAMBDA PHYSIK AG7 citations73
US6556609B2Apr 29, 2003
Discharge unit for a high repetition rate excimer or molecular fluorine laser
LAMBDA PHYSIK AG8 citations73
US6546036B1Apr 8, 2003
Roof configuration for laser discharge electrodes
LAMBDA PHYSIK AG12 citations73
US6430205B2Aug 6, 2002
Discharge unit for a high repetition rate excimer or molecular fluorine laser
LAMBDA PHYSIK AG4 citations73
US7079565B2Jul 18, 2006
Systems and methods utilizing laser discharge electrodes with ceramic spoilers
LAMBDA PHYSIK AG8 citations71
US7266137B2Sep 4, 2007
Laser gas replenishment method
LAMBDA PHYSIK AG5 citations62
US6834066B2Dec 21, 2004
Stabilization technique for high repetition rate gas discharge lasers
LAMBDA PHYSIK AG6 citations62
US6785316B1Aug 31, 2004
Excimer or molecular laser with optimized spectral purity
LAMBDA PHYSIK AG6 citations62