Inventor
FOUNTAIN GAIUS G
US3 patents
Patents
3 patentsUS6558504B1May 6, 2003
Plasma processing system and method
RES TRIANGLE INST13 citations81
US7112536B2Sep 26, 2006
Plasma processing system and method
RES TRIANGLE INST7 citations71
US5168330ADec 1, 1992
Semiconductor device having a semiconductor substrate interfaced to a dissimilar material by means of a single crystal pseudomorphic interlayer
RES TRIANGLE INST11 citations71